Fabrication of thin film piezoelectric ultrasonic transducer

Midwest Symposium on Circuits and Systems

Volumn 2, Issue , 2001, Pages 726-729

  Mohamed, Hisham ^a   Polla, Dennis ^a   Ebbini, Emad ^a   Zurn, Shayne ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSTALK; ELECTRIC IMPEDANCE; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING; THIN FILMS; ULTRASONIC WAVES;

IMPEDANCE CHARACTERISTICS; MICROELECTROMECHANICAL SYSTEMS;

ULTRASONIC TRANSDUCERS;

EID: 0035573257     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

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