Low-loss, tunable bismuth zinc niobate films deposited by rf magnetron sputtering

Applied Physics Letters

Volumn 83, Issue 12, 2003, Pages 2411-2413

  Lu, Jiwei ^a   Stemmer, Susanne ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRODES; MAGNETRON SPUTTERING; PERMITTIVITY; TUNING;

DIELECTRIC LOSS TANGENTS;

THIN FILMS;

EID: 0142026444     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1613036     Document Type: Article

References (17)

1. J. Im, O. Auciello, and S. K. Streiffer, Thin Solid Films 413, 243 (2002).
2. A. Tombak, J. P. Maria, F. Ayguavives, Z. Jin, G. T. Stauf, A. I. Kingon, and A. Mortazawi, IEEE Microw. Wirel. Compon. Lett. 12, 3 (2002).
3. S. K. Streiffer, C. Basceri, C. B. Parker, S. E. Lash, and A. I. Kingon, J. Appl. Phys. 86, 4565 (1999).
4. I. Levin, T. G. Amos, J. C. Nino, T. A. Vanderah, C. A. Randall, and M. T. Lanagan, J. Solid State Chem. 168, 69 (2002).
5. M. Valant and P. K. Davies, J. Am. Ceram. Soc. 83, 147 (2000).
6. X. L. Wang, H. Wang, and X. Yao, J. Am. Ceram. Soc. 80, 2745 (1997).
7. L. F. Edge, J.-P. Maria, and S. Trolier-McKinstry (unpublished).
8. L. F. Edge, M.S. thesis, Penn State University, 2002.
9. W. Ren, S. Trolier-McKinstry, C. A. Randall, and T. R. Shrout, J. Appl. Phys. 89, 767-774 (2001).
10. Y. P. Hong, S. Ha, H. Y. Lee, Y. C. Lee, K. H. Ko, D. W. Kim, H. B. Hong, and K. S. Hong, Thin Solid Films 419, 183 (2002).
11. R. L. Thayer, C. A. Randall, and S. Trolier-McKinstry, J. Appl. Phys. 94, 1941 (2003).
12. J. Lu, Z. Q. Chen, T. R. Taylor, and S. Stemmer, J. Vac. Sci. Technol. A 21, 1745 (2003).
13. A. J. Moulson and J. M. Herbert, Electroceramics (Chapman & Hall, London, 1990).
14. J. D. Baniecki, R. B. Laibowitz, T. M. Shaw, P. R. Duncombe, D. A. Neumayer, D. E. Kotecki, H. Shen, and Q. Y. Ma, Appl. Phys. Lett. 72, 498 (1998).
15. B. Acikel, Ph.D. thesis, University of California Santa Barbara, 2002.
16. T. R. Taylor, P. J. Hansen, N. Pervez, B. Acikel, R. A. York, and J. S. Speck, J. Appl. Phys. 94, 3390 (2003).
17. J. C. Nino, M. T. Lanagan, and C. A. Randall, J. Appl. Phys. 89, 4512 (2001).