Nanocrystals Used as Masks for Nanolithography

Journal of Physical Chemistry B

Volumn 107, Issue 36, 2003, Pages 9617-9619

  Ingert, D ^a   Pileni, M P ^a  

^a UMR 8233 CNRS Université Pierre et Marie Curie   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COLLOIDS; ETCHING; FERRITE; LITHOGRAPHY; MASKS; NANOTECHNOLOGY; SILICON WAFERS; SUBSTRATES;

MESOSCOPIC STRUCTURES;

NANOSTRUCTURED MATERIALS;

EID: 0141972611     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp030381d     Document Type: Article

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