Environmentally rugged, wide dynamic range microstructure airflow sensor

Technical Digest, 1990 Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1990, Pages 158-160

  Ohnstein, T R ^a   Johnson, R G ^a   Higashi, R E ^a   Burns, D W ^a   Holmen, J O ^a   Satren, E A ^a   Johnson, G M ^a   Bicking, R E ^a   Johnson, S D ^a  

^a HONEYWELL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; PLATINUM AND ALLOYS - METALLIZING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

AIRFLOW SENSORS; HARSH ENVIRONMENTS; LIFE TESTING;

FLOW OF FLUIDS;

EID: 0025559262     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/solsen.1990.109843     Document Type: Conference Paper

References (3)