Calculation of Size Distribution of Void Defects in CZ Silicon

Journal of the Electrochemical Society

Volumn 150, Issue 9, 2003, Pages

  Akatsuka, Masanori ^a   Okui, Masahiko ^a   Umeno, Shigeru ^a   Sueoka, Koji ^a  

^a SUMCO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL GROWTH; DIFFUSION; NUCLEATION;

SIZE DISTRIBUTION;

CRYSTAL DEFECTS;

EID: 0141788366     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1599854     Document Type: Article

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