Efficient CFD modeling of single wafer semiconductor fabrication systems for closed-loop evaluation

Proceedings of the IEEE Conference on Decision and Control

Volumn 1, Issue , 1997, Pages 830-831

  Ebert, J L ^a   van der Linden, G W ^a   Kosut, R L ^a   Emami Naeini, A ^a  

^a SC Solutions   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SOFTWARE; FINITE ELEMENT METHOD; FINITE VOLUME METHOD; HEAT TRANSFER COEFFICIENTS; INTERFACES (MATERIALS); ITERATIVE METHODS; MATHEMATICAL MODELS;

SINGLE WAFER SYSTEMS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031389082     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)