Run-to-run control of static systems

Proceedings of the IEEE Conference on Decision and Control

Volumn 1, Issue , 1998, Pages 695-700

  Kosut, Robert L ^a   de Roover, Dick ^a   Emami Naeini, Abbas ^a   Ebert, Jon L ^a  

^a SC Solutions Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

RAPID THERMAL OXIDATION (RTO); RUN-TO-RUN CONTROL SYSTEMS;

COMPUTER SIMULATION; MATHEMATICAL MODELS; PROCESS CONTROL; ROBUSTNESS (CONTROL SYSTEMS); SYSTEM STABILITY; THERMOOXIDATION;

LINEAR CONTROL SYSTEMS;

EID: 0032259997     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)

1. Boning, D., et al."Run by Run Control of Chemical Mechanical Polishing," IEEE Trans. on Components, Packaging, and Manufacturing Technology, Vol. 19, NO. 4, pp. 307-314, Oct. 1996.
2. Sachs, E., A. Hu, A. Ingolfsson, "Run by Run Processs Control: Combining SPC and Feedback Control," IEEE Trans. Semi. Manu., Oct. 1991.
3. Butler, S. W., J. Stefani, "Application of Predictive Corrector Control to Polysilicon Gate Etching," Proc. American Contr. Conf., June 1993.
4. Ebert, J. L., A. Emami-Naeini, R. L. Kosut, "Thermal Modeling of Rapid Thermal Processing Systems," 3rd International Rapid Thermal Processing Conference, R. B. Fair, B. Lojek (eds), pp. 343-355, Amsterdam, The Netherlands, 1995.
5. Nulman, J., "Rapid Thermal Processing with Reactive Gases," in Reduced Thermal Processing for ULSI, Ed. R. A. Levy, NATO AS1 Series, Plenum, 1989.
6. Roover, D. de, A. Emami-Naeini, J. L. Ebert, S. Ghosal, G. W. van der Linden, " Model-Based Control of Fast-Ramp RTP Systems," 6th International Rapid Thermal Processing Conference, Kyoto, Japan, 1998.