Application of a ferroelectric liquid-crystal-on-silicon display in fringe projection setups

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5144, Issue , 2003, Pages 280-287

  Proll, Klaus Peter ^a   Nivet, Jean Marc ^a   Körner, Klaus ^a   Tiziani, Hans J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Ferroelectric liquid crystal on silicon display; Fringe projection; Microscopic three dimensional measurement; Spatial light modulator

Indexed keywords

ALGORITHMS; BIREFRINGENCE; DIFFRACTION GRATINGS; FERROELECTRIC DEVICES; LIGHT MODULATORS; LIQUID CRYSTAL DISPLAYS; MIRRORS; NEMATIC LIQUID CRYSTALS; PHASE SHIFT;

DIGITAL MICROMIRROR DEVICES; LIQUID CRYSTAL ON SILICON DISPLAY; PHASE SHIFTING ALGORITHMS;

OPTICAL VARIABLES MEASUREMENT;

EID: 0141720533     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499646     Document Type: Conference Paper

References (16)

1. K. Leonhardt, U. Droste, H.J. Tiziani, "Microshape and rough-surface analysis by fringe projection", Appl. Opt. 33, 7477-7488, 1994.
2. T. Wilson, ed., Confocal microscopy Academic, London, 1990
3. D. Steudle, M. Wegner, H. J. Tiziani, "Confocal principle for macro- and microscopic surface and defect analysis", Opt. Eng. 39, 32-39, 2000.
4. G. S. Kino, S. Chim, "Mirau correlation microscope", Appl. Opt. 29, 3775-3783, 1990
5. P. de Groot, L. Deck, "Surface profiling by analysis of white-light interferograms in the spatial frequency domain", J. Mod. Opt. 42, 389-401, 1995
6. R. Windecker, M. Fleicher, H.J. Tiziani, "Three-dimensional topometry with stereo microscopes", Opt. Eng. 36, 3372-3377, 1997
7. R. Windecker, S. Franz, H. J. Tiziani, "Optical roughness measurements with fringe projection", Appl. Opt. 38, 2837-2842, 1999
8. R. Windecker, M. Fleicher, S. Franz, H. J. Tiziani, "Testing micro devices with fringe projection and white-light interferometry", Optics and Lasers in Engineering 36, 141-154, 2001.
9. K.-P. Proll, J.-M. Nivet, C. Voland, H. J. Tiziani, "Application of a liquid-crystal spatial light modulator for brightness adaptation in microscopic topometry", Appl. Opt. 39, 6430-6435, 2000
10. G. Frankowski, "Optisches 3D-Meßsystem zur Mikroprofil- und Rauheitsmessung", F&M 106, 612-615, 1998.
11. E. Lueder, Liquid Crystal Displays, John Wiley & Sons, Chichester (UK), 2001
12. D. G. Vass, W. J. Hossack, S. Nath, A. O'Hara, I. D. Rankin, M. W. G. Snook, I. Underwood, M. R. Worboys, M. S. Griffith, S. Radcliffe, D. Macintosh, J. Harkness, B. Mitchel, G. Rickard, J. Harris, E. Judd, "A high resolution, full colour, head mounted ferroelectric liquid-crystal-over-silicon display", Ferroelectrics 213, 209-218, 1998.
13. J. C. Wyatt, "Use of an ac heterodyne lateral shear interferometer with real-time wavefront correction systems", Appl. Opt. 14, 2622-2626, 1975
14. P. Lehle, H. Gärtner, H. J. Tiziani, C. Voland, "Coded light setups with optimised transformations of code indices", Proc. SPIE 2784, 12-20 (1996)
15. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources", Appl. Opt. 22, 3421-3432, 1983
16. R. Kowarschik, P. Kühmstedt, J. Gerber, W. Schreiber, G. Notni, "Adaptive optical three-dimensional measurement with structured light", Opt. Eng. 39, 150-158, 2000