Energy dependence of proximity parameters investigated by fitting before measurement tests

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2298-2302

  Aparshina, L I ^a   Dubonos, S V ^a   Maksimov, S V ^a   Svintsov, A A ^a   Zaitsev, S I ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007140499     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589633     Document Type: Article

References (11)

1. R. J. Hawryluk, J. Vac. Sci. Technol. 19, 1 (1981).
2. C.-H. Shaw, J. Vac. Sci. Technol. 19, 1269 (1981).
3. V. V. Aristov, S. V. Babin, A. I. Erko, and L. V. Dorozhkina, Proceedings of the International Conference "ME '83," Cambridge, 1983, p. 57.
4. L. Stevens, R. Jonkheere, E. Froyen, S. Decoutere, and D. Lanneer, Proceedings of the International Conference "ME '86," Zurich, 1986, p. 98.
5. V. V. Aristov, S. V. Babin, A. V. Davydov, A. I. Erko, A. A. Svintsov, and S. V. Redkin, Proceedings of the International Conference "ME '87," 1987, p. 129.
6. S. A. Rishton and D. P. Kern, J. Vac. Sci. Technol. B 5, 135 (1987).
7. S. J. Wind, M. G. Rosenfield, G. Pepper, W. W. Molzen, and P. D. Gerber, J. Vac. Sci. Technol. B 7, 1507 (1989).
8. L. Raimer, Scanning Electron Microscopy (Springer, Berlin, 1985).
9. S. V. Dubonos, B. N. Gaifullin, H. F. Raith, A. A. Svintsov, and S. I. Zaitsev, Microelectron. Eng. 21, 293 (1993).
10. V. V. Aristov, A. L. Erko, B. N. Gaifullin, A. A. Svintsov, S. I. Zaitsev, R. R. Jede, and H. F. Raith, Microelectron. Eng. 17, 413 (1992).
11. V. V. Aristov, B. N. Gaifullin, A. A. Svintsov, S. I. Zaitsev, R. R. Jede, and H. F. Raith, J. Vac. Sci. Technol. B 10, 2459 (1992).