A novel laser ablation patterning with organic film in running water

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5039 II, Issue , 2003, Pages 1220-1228

  Ito, Shinichi ^a   Ikegami, Hiroshi ^a   Kawano, Kenji ^a   Takeishi, Tomoyuki ^a   Hayasaka, Nobuo ^a   Kobayashi, Masayoshi ^b   Hamamoto, Tetsuya ^b   Ogawa, Yoichi ^b   Yoshitaka, Naoto ^c   Terada, Shoichi ^c  

^a TOSHIBA CORPORATION   (Japan)

^b DAINIPPON SCREEN MFG CO LTD   (Japan)

^c TOKYO ELECTRON LTD   (Japan)

Author keywords

Alignment mark; Anti reflective layer; ARL; Bubble; Laser ablation; Tri level resist process

Indexed keywords

BUBBLE FORMATION; LASER ABLATION; ORGANIC COMPOUNDS; PARTICLE SIZE ANALYSIS; THICKNESS MEASUREMENT; WATER;

ANTIREFLECTION PERFORMANCE; DOME SHAPE BUBBLE; ORGANIC FILM; PARTICLE-FREE SELECTIVE REMOVAL; RUNNING WATER; THICKNESS RATIO;

PHOTORESISTS;

EID: 0141610970     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485045     Document Type: Conference Paper

References (6)

1. K. Sho et al, "Material and Process Development for KrF Lithography using Tri-level Resist Process", J. Photopolym. Sci. Technol., Vol.14(3) 469 (2001)
2. Y. Sato et al, "Spun-on carbon antireflective layer with etch resistance for deep and vacuum ultraviolet lithography processes", J. Vac. Sci. Technol. B19(6), 2385 (2001)
3. Y. Sato et al, "Pattern Transfer Process Using Spun-on Carbon Film for KrF and ArF Lithography", J. Photopolym. Sci. Technol., Vol.14(3), 439 (2001)
4. Dupont, A. et al, "Enhancement of material ablation using 248, 308, 532, 1064 nm laser pulse with a water film on the treated surface", J. Appl. Phys. (USA), vol. 78(3), 2022-8 (1995)
5. Frenz, M. et al, "Starting mechanisms and dynamics of bubble formation induced by a Ho: Yttrium aluminum garnet laser in water", J. Appl. Phys. (USA), vol. 84(11)5905 (1998)
6. Brujan, E.-A. et al, "Dynamics of laser-induced cavitation bubbles near an elastic boundary", J. Fluid Mech. (UK), vol.433, 251-81 (2001)