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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 7 B, 2003, Pages

Flexible polysilicon strain gauge array

(2) Hwang, Eun Soo a Kim, Yong Jun a

a Yonsei University (South Korea)

Author keywords

Flexible; Piezoresistivity; Release etching; Sensor array; Strain gauge

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRONICS PACKAGING; GLASS; MICROMACHINING; PHOSPHORUS COMPOUNDS; POLYIMIDES; POLYSILICON; PRINTED CIRCUIT BOARDS; SILICA; SILICON NITRIDE; SILICON WAFERS; SURFACE TREATMENT;

FLEXIBLE POLYSILICON STRAIN GAUGE ARRAY; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; PHOSPHORUS SILICA GLASS FILM; POLYIMIDE CIRCUIT BOARDS; SENSOR ARRAY; SURFACE MICROMACHINING;

STRAIN GAGES;

EID: 0141606730 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.l810 Document Type: Letter

Times cited : (5)

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