Numerical Analysis and Experimental Investigation of Discharge Characteristics in a Ring Dielectric Line Surface-Wave Processing Plasma Apparatus

Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)

Volumn 145, Issue 2, 2003, Pages 10-20

  Kim, Jaeho ^a   Itagaki, Toshifumi ^a   Katsurai, Makoto ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Analysis of electromagnetic wave; Finite difference time domain (FDTD); Microwave discharge; Surface wave plasma (SWP)

Indexed keywords

CARRIER CONCENTRATION; DIELECTRIC PROPERTIES; PLASMAS; SURFACE WAVES;

SURFACE-WAVE PROCESSING;

ELECTRIC DISCHARGES;

EID: 0141526312     PISSN: 04247760     EISSN: None     Source Type: Journal    
DOI: 10.1002/eej.10174     Document Type: Article

References (31)

1. Nonaka S. Surface waves and plasma production: Overview - Excitation and propagation of surface waves. Plasma Fusion Res 1996;72:622. (in Japanese)
2. Trivelpiece AW, Gould RW. Space charge waves in cylindrical plasma columns. J Appl Phys 1959;30:1784.
3. Akao Y, Ida Y. Electron density measurement of a plasma column by surface wave resonances. J Appl Phys 1964;35:2565.
4. Moisan M, Beaudry C, Leprince P. A new device for the production of long plasma columns at a high electron density. Phys Lett 1974;50A:125.
5. Moisan M. Description and properties of an RF plasma used for the study of parametric interaction of a strong E-M field with plasma. Plasma Phys 1974;16:1.
6. Moisan M, Beaudry C, Leprince P. A small microwave plasma source for long column production without magnetic field. IEEE Trans Plasma Sci 1975;3:55.
7. Zakrzewski Z, Moisan M, Glaude VMN, Beaudry C, Leprince P. Attenuation of a surface wave in an unmagnetized RF plasma column. Plasma Phys 1977;19:77.
8. Moisan M, Zakrzewski Z, Pantel R. The theory and characteristics of an efficient surface wave launcher (surfatron) producing long plasma columns. J Phys D 1979;12:219.
9. Glaude VMM, Moisan M, Pantel R. Axial electron density and wave power distributions along a plasma column sustained by the propagation of a surface microwave. J Appl Phys 1980:51:5693.
10. Moisan M, Shivarova A, Trivelpiece AW. Experimental investigations of the propagation of surface waves along a plasma column. Plasma Phys 1982;24:1331.
11. Moisan M, Zakrzewski Z. Plasma sources based on the propagation of electromagnetic surface waves. J Phys D 1991;24:1025.
12. Komachi K, Kobayashi S. Generation of a microwave plasma using traveling waves. J Microwave Power Electromagn Energy 1989;24:140.
13. Nagatsu M, Sugai H. Enlargement of surface wave-excited planar plasma. J Plasma Fusion Res 1996:72:658. (in Japanese)
14. 2O plasma downstream. J Vac Sci Technol B 1991;9:357.
15. Kimura T, Yoshida Y, Mizuguchi S. Generation of a surface-wave-enhanced plasma using coaxial-type open-ended dielectric cavity. Jpn J Appl 1995;34: L1076.
16. Korzec D, Werner F, Winter R, Engemann J. Scaling of microwave slot antenna (SLAN): a concept for efficient plasma generation. Plasma Sources Sci Technol 1996;5:216.
17. Kaneko E, Okamoto T, Watanabe S, Okamoto Y. Characteristics of a large-diameter surface-wave mode microwave-induced plasma. Jpn J Appl Phys 1998;37:L170.
18. Ghanashev I, Nagatsu M, Sugai H. Surface wave eigenmodes in a finite-area plane microwave plasma. Jpn J Appl Phys 1997;36(Pt. 1, No. 1A):337.
19. Nagatsu M, Xu G, Yamage M, Kanoh M, Sugai H. Optical emission and microwave field intensity measurements in surface wave-excited planar plasma. Jpn J Appl Phys 1996;35:L341.
20. Tamura H, Yatanabe S, Huruse M. Plasma processing device and method. Japanese Patent Tokkyo-Kai-Hei 9-270386, 1997. (in Japanese)
21. Shimatani K, Okamoto Y. Production of a large-area microwave plasma by a ring slot antenna. Plasma Science Symposium 2001/18th Symposium on Plasma Processing (PSS-2001/SPP-18), P3-02, p 539.
22. Yee KS. Numerical solution of initial boundary value problems involving Maxwell's equations in Isotropic media. IEEE Trans Antennas Propag 1966;14:302.
23. Kunz S, Luebbers R. The finite difference time domain method for electromagnetics. CRC Press; 1993.
24. Taflove A. Computational electrodynamics. The finite-difference time-domain method. Artech House; 1995.
25. Hasimoto O, Abe T. Fundamental finite difference time domain. Morikita; 1996. (in Japanese)
26. Uno T. Analysis of electromagnetic fields and antenna by FDTD method. Corona; 1998. (in Japanese)
27. Tan W, Grotjohn TA. Modeling the electromagnetic excitation of a microwave cavity plasma reactor. J Vac Sci Technol A 1994;12:1216.
28. Chen Q, Katsurai M, Aoyagi PH. Numerical analysis of surface wave excitation in a planar-type nonmagnetized plasma processing device. IEEE Trans Plasma Sci 1999;27:164.
29. Young JL. A full finite difference time domain implementation for radio wave propagation in a plasma. Am Geophys Union Radio Sci 1994;29:1513.
30. Sugai H. Plasma behavior and sample monitoring. Plasma class of the plasma electronics division in the Japan society of applied physics, Nagoya University (June, 2001). (in Japanese)
31. Aliev YM, Schluter H, Shivarova A. Guided-wave-produced plasmas. Springer; 2000.