Quantum efficiency of PAG decomposition in different polymer matrices at advanced lithographic wavelengths

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5039 I, Issue , 2003, Pages 310-321

  Fedynyshyn, Theodore H ^a   Sinta, Roger F ^a   Mowers, William A ^a   Cabral, Alberto ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Dill C parameter; PAG decomposition; Photochemistry

Indexed keywords

COMPUTER SIMULATION; DECOMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT ABSORPTION; MATHEMATICAL MODELS; OPTICAL PROPERTIES; ORGANIC POLYMERS; RATE CONSTANTS;

LITHOGRAPHIC WAVELENGTHS; PHOTOACTIVE SPECIES; POLYMER MATRICES;

PHOTORESISTS;

EID: 0141499950     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.483705     Document Type: Conference Paper

References (11)

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