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Materials Science Forum

Volumn 433-436, Issue , 2003, Pages 45-50

Defects in Semi-Insulating SiC Substrates

(5) Son, N T a Magnusson, B a,b Zolnai, Z a,c Ellison, A b Janzen E a

a LINKÖPING UNIVERSITY (Sweden)

b Okmetic AB (Sweden)

c RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE (Hungary)

Author keywords

Impurities; Intrinsic Defects; Magnetic Resonance; Resistivity; Semi Insulating; Thermal Annealing

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; PARAMAGNETIC RESONANCE;

PHYSICAL VAPOR TRANSPORT (PVT);

SILICON CARBIDE;

EID: 0141481122 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.433-436.45 Document Type: Conference Paper

Times cited : (34)

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