SCOPUS 정보 검색 플랫폼

Journal of Materials Science Letters

Volumn 22, Issue 16, 2003, Pages 1155-1156

Growth of ZnO thin film on SiO2 substrates by the RF magnetron sputtering method

(3) Kim, K S a Kim, H W a Kim, N H a

a Inha University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; FILM GROWTH; MAGNETRON SPUTTERING; OPTICAL PUMPING; SCANNING ELECTRON MICROSCOPY; SILICA; SUBSTRATES; SURFACE WAVES; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ATOMIC LAYER DEPOSITION (ALD);

THIN FILMS;

EID: 0141458348 PISSN: 02618028 EISSN: None Source Type: Journal
DOI: 10.1023/A:1025131212403 Document Type: Article

Times cited : (5)

References (15)

1
- 0019024175
- T. YAMAMOTO, T. SHIOSAKI and A. KAWABATA, J. Appl. Phys. 51 (1980) 3113.
- (1980) J. Appl. Phys. , vol.51 , pp. 3113
- Yamamoto, T.¹ Shiosaki, T.² Kawabata, A.³

2
- 0037437774
- R. ONDO-NDONG, F. PASCAL-DELANNOY, A. BOYER, A. GIANI and A. FOUCARAN, Mater. Sci. Eng. B 97 (2003) 68.
- (2003) Mater. Sci. Eng. B , vol.97 , pp. 68
- Ondo-Ndong, R.¹ Pascal-Delannoy, F.² Boyer, A.³ Giani, A.⁴ Foucaran, A.⁵

3
- 0037211031
- J.-H. LEE, K.-H. KO and B.-O. PARK, J. Cryst. Growth 247 (2003) 119.
- (2003) J. Cryst. Growth , vol.247 , pp. 119
- Lee, J.-H.¹ Ko, K.-H.² Park, B.-O.³

4
- 0037213538
- R. AYOUCHI, F. MARTIN, D. LEINEN and J. R. RAMOS-BARRADO, ibid. 247 (2003) 497.
- (2003) J. Cryst. Growth , vol.247 , pp. 497
- Ayouchi, R.¹ Martin, F.² Leinen, D.³ Ramos-Barrado, J.R.⁴

5
- 0036895376
- B. J. LOKHANDE, P. S. PATIL and M. D. UPLANE, Mater. Lett. 57 (2002) 573.
- (2002) Mater. Lett. , vol.57 , pp. 573
- Lokhande, B.J.¹ Patil, P.S.² Uplane, M.D.³

6
- 0141861712
- J. N. ZENO, J. K. LOW, Z. M. REN, T. LIEW and Y. F. LU, App. Surf. Sci. 197 (2002) 362.
- (2002) App. Surf. Sci. , vol.197 , pp. 362
- Zeno, J.N.¹ Low, J.K.² Ren, Z.M.³ Liew, T.⁴ Lu, Y.F.⁵

7
- 0037011454
- H. KIM, J. S. HORWITZ, S. B. QADRI and D. B. CHRISEY, Thin Solid Film 420 (2002) 107.
- (2002) Thin Solid Film , vol.420 , pp. 107
- Kim, H.¹ Horwitz, J.S.² Qadri, S.B.³ Chrisey, D.B.⁴

8
- 0034347627
- S. W. WHANGBO, H. K. JANG, S. G. KIM, M. H. CHO, K. H. JEONG and C. N. WHANG, J. Korean Phys. Soc. 37 (2000) 456.
- (2000) J. Korean Phys. Soc. , vol.37 , pp. 456
- Whangbo, S.W.¹ Jang, H.K.² Kim, S.G.³ Cho, M.H.⁴ Jeong, K.H.⁵ Whang, C.N.⁶

9
- 0037296924
- B. S. LI, Y. C. LIU, D. Z. SHEN, J. Y. ZHANG, Y. M. LU and X. Q. FAN, J. Cryst. Growth 249 (2003) 179.
- (2003) J. Cryst. Growth , vol.249 , pp. 179
- Li, B.S.¹ Liu, Y.C.² Shen, D.Z.³ Zhang, J.Y.⁴ Lu, Y.M.⁵ Fan, X.Q.⁶

10
- 0031546852
- A. YAMADA, B. SANG and M. KONAGAI, Appl. Surf. Sci. 112 (1997) 216.
- (1997) Appl. Surf. Sci. , vol.112 , pp. 216
- Yamada, A.¹ Sang, B.² Konagai, M.³

11
- 0035573611
- X. L. XU, S. P. LAU, J. S. CHEN, Z. SUN, B. K. TAY and J. W. CHAI, Mater. Sci. Semicon. Proc. 4 (2001) 617.
- (2001) Mater. Sci. Semicon. Proc. , vol.4 , pp. 617
- Xu, X.L.¹ Lau, S.P.² Chen, J.S.³ Sun, Z.⁴ Tay, B.K.⁵ Chai, J.W.⁶

12
- 0035480355
- G. GORDILLO and C. CALDERON, Solar Energy Mater. Solar Cells 69 (2001) 251.
- (2001) Solar Energy Mater. Solar Cells , vol.69 , pp. 251
- Gordillo, G.¹ Calderon, C.²

13
- 0036724579
- G. DU, J. WANG, X. WANG, X. JIANG, S. YANG, Y. MA, W. YAN, D. GAO, X. LIU, H. CAO, J. XU and R. P. H. CHANG, J. Cryst. Growth 243 (2003) 439.
- (2003) J. Cryst. Growth , vol.243 , pp. 439
- Du, G.¹ Wang, J.² Wang, X.³ Jiang, X.⁴ Yang, S.⁵ Ma, Y.⁶ Yan, W.⁷ Gao, D.⁸ Liu, X.⁹ Cao, H.¹⁰ Xu, J.¹¹ Chang, R.P.H.¹²

14
- 0033706497
- K. IWATA, P. FONS, S. NIKI, A. YAMADA, K. MATSUBARA, K. NAKAHARA, T. TANABE and H. TAKASU, ibid. 214/215 (2000) 50.
- (2000) J. Cryst. Growth , vol.214-215 , pp. 50
- Iwata, K.¹ Fons, P.² Niki, S.³ Yamada, A.⁴ Matsubara, K.⁵ Nakahara, K.⁶ Tanabe, T.⁷ Takasu, H.⁸

15
- 0032516949
- S. GUHA and N. A. BOJARCZUK, Appl. Phys. Lett. 73 (1998) 1487.
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1487
- Guha, S.¹ Bojarczuk, N.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.