Microstructural study on multilayer [FeTaN/TaN]5 films

Materials Letters

Volumn 57, Issue 24-25, 2003, Pages 3904-3909

  Zhan, Qian ^a   Yu, Rong ^a   He, Lianlong ^a   Li, Douxing ^a   Nie, Hongbin ^b   Ong, Chongkim ^b  

^a INSTITUTE OF METAL RESEARCH   (China)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Magnetic materials; Microstructure; Sputtering; Thin films; Transmission electron microscopy (TEM)

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; HIGH RESOLUTION ELECTRON MICROSCOPY; MAGNETIC MATERIALS; MULTILAYERS; SOLID SOLUTIONS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

GRAIN CLUSTERS;

TANTALUM COMPOUNDS;

EID: 0043062808     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(03)00238-6     Document Type: Article

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