Recent advances in silicon guided-wave MOEMS: From technology to applications

Opto-Electronics Review

Volumn 9, Issue 3, 2001, Pages 248-256

  Gorecki, C ^a  

^a LOPMD Inst Microtechniques F   (France)

Author keywords

Integrated optics; Optical MEMS; Silicon micromachining

Indexed keywords

EID: 0042982083     PISSN: 12303402     EISSN: 18963757     Source Type: Journal    
DOI: None     Document Type: Article

References (23)

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