Micromachined aperture probe tip for multifunctional scanning probe microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3099, Issue , 1997, Pages 248-256

  Abraham, Michael ^a   Ehrfeld, Wolfgang ^a   Lacher, Manfred ^a   Marti, Othmar ^a   Mayr, Karsten ^a   Noell, Wilfried ^a   Guethner, Peter ^a   Barenz, Joachim ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FABRICATION; MICROMACHINING; OPTICAL FIBERS; OPTICAL WAVEGUIDES; SCANNING;

NEAR FIELD OPTICAL MICROSCOPY; SCANNING PROBE MICROSCOPY;

OPTICAL SENSORS;

EID: 0031326659     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)