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Volumn 74, Issue 8, 2003, Pages 3879-3880

Robust and inexpensive thermal vaporizer for low-vapor pressure liquids

Author keywords

[No Author keywords available]

Indexed keywords

HARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STAINLESS STEEL; THIN FILMS; VAPORIZATION;

EID: 0042878536     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1589157     Document Type: Article
Times cited : (8)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.