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Volumn 74, Issue 8, 2003, Pages 3879-3880
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Robust and inexpensive thermal vaporizer for low-vapor pressure liquids
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Author keywords
[No Author keywords available]
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Indexed keywords
HARDNESS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
STAINLESS STEEL;
THIN FILMS;
VAPORIZATION;
THERMAL VAPORIZERS;
ORGANOMETALLICS;
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EID: 0042878536
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1589157 Document Type: Article |
Times cited : (8)
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References (12)
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