Application of phase shifting technique for SEM scanning moiré method in MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5058, Issue , 2003, Pages 417-424

  Shang, Hai Xia ^a   Xie, HuiMin ^a   Dai, FuLong ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

MEMS; Phase shifting technique; SEM scanning moir method; Strain

Indexed keywords

DEFORMATION; ELECTRON BEAMS; HOLOGRAPHIC INTERFEROMETRY; INTERFEROMETERS; MECHANICAL VARIABLES MEASUREMENT; MOIRE FRINGES; PHASE SHIFT; SCANNING ELECTRON MICROSCOPY; SPECKLE; STRAIN;

SUB MICRO MOIRE METHOD;

MICROELECTROMECHANICAL DEVICES;

EID: 0042858614     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.509793     Document Type: Conference Paper

References (8)

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