Investigation of the low-pressure plasma-chemical conversion of fluorocarbon waste gases

Plasma Chemistry and Plasma Processing

Volumn 17, Issue 1, 1997, Pages 39-57

  Breitbarth, F W ^a   Berg, D ^a   Dumke, K ^a   Tiller, H J ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Fluorocarbon compounds; Kinetics; Low pressure plasma decomposition; Waste gas conversion

Indexed keywords

EID: 0031478672     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02766821     Document Type: Article

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