Structures and bonding properties of carbon nitride films prepared by radio frequency magnetron sputtering

Jinshu Xuebao/Acta Metallurgica Sinica

Volumn 35, Issue 4, 1999, Pages 439-442

  Guo, Jiandong ^a   Li, Yin'an ^a   Zhao, Ruwen ^a   Wang, Enge ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

Carbon nitride film; Multiple beam interference; Radio frequency magnetron sputtering

Indexed keywords

EID: 0042726662     PISSN: 04121961     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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