Deposition and dielectric properties of CaCu3Ti 4O12 thin films on Pt/Ti/SiO2/Si substrates using pulsed-laser deposition

Thin Solid Films

Volumn 440, Issue 1-2, 2003, Pages 60-65

  Fang, Liang ^a   Shen, Mingrong ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

Deposition process; Dielectric properties; Laser ablation; Structural properties

Indexed keywords

CALCIUM COMPOUNDS; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; DIELECTRIC PROPERTIES OF SOLIDS; MORPHOLOGY; PULSED LASER DEPOSITION; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

PREFERENTIAL ORIENTATION;

THIN FILMS;

EID: 0042623355     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00825-3     Document Type: Article

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