Microhollow cathode discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1260-1265

  Schoenbach, K H ^a   Moselhy, M ^a   Shi, W ^a   Bentley, R ^a  

^a Old Dominion University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ATMOSPHERIC PRESSURE; CATHODES; CURRENT VOLTAGE CHARACTERISTICS; DENSITY OF GASES; ELECTRON EMISSION; ELECTRONIC DENSITY OF STATES; EXCIMER LASERS; IONIZATION; LASER APPLICATIONS; PLASMA SPRAYING;

ABNORMAL GLOW MODE; ELECTRON ENERGY DISTRIBUTION; EXCIMER LAMP; HOLLOW CATHODE; MICROPLASMA; PLASMA REACTOR;

GLOW DISCHARGES;

EID: 0042530527     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1565154     Document Type: Article

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