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Volumn 88, Issue 6, 2000, Pages 3220-3224

Series operation of direct current xenon chloride excimer sources

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000922771     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1288699     Document Type: Article
Times cited : (53)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.