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Volumn 88, Issue 6, 2000, Pages 3220-3224
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Series operation of direct current xenon chloride excimer sources
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000922771
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1288699 Document Type: Article |
Times cited : (53)
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References (9)
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