Microdischarge arrays: A new family of photonic devices (revised)

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 2, 2002, Pages 387-394

  Park, Sung Jin ^a,b   Chen, Jack ^b   Wagner, Clark J ^b   Ostrom, Nels P ^a,b   Liu, Chang ^b   Eden, J Gary ^a,b  

^a IEEE   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

Discharges; Displays; Optical device integration; Optoelectronic devices

Indexed keywords

MICROOPTOELECTRONIC SYSTEMS; PHOTONIC DEVICE; SILICON BASED MICRODISCHARGE DEVICES;

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC DISCHARGES; INFRARED RADIATION; MICROOPTICS; OPTICAL MICROSCOPY; PHOTONS; SEMICONDUCTING FILMS; SEMICONDUCTING POLYMERS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES;

INTEGRATED OPTOELECTRONICS;

EID: 0036493153     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.999194     Document Type: Article

References (14)

1. The plasma display panel -- A digitally addressable display with inherent memory
2. Plasma displays
3. Microdischarge devices fabricated in silicon
4. Continuous wave emission in the ultraviolet from diatomic excimers in a microdischarge
5. Planar microdischarge arrays
6. Flexible microdischarge arrays: Metal/polymer devices
7. Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays
8. Performance of microdischarge devices and arrays with screen electrodes
9. Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes
10. Excitation of a microdischarge with a reverse-biased pn junction
11. Multistage, monolithic ceramic microdischarge device having an active length of ∼0.27 mm
12. Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems
13. Maskless etching of silicon using patterned microdischarges
14. Microdischarge array-assisted ignition of a high pressure discharge: Application to are lamps