Effects of sputtering condition on tribological properties of tungsten coatings

Wear

Volumn 255, Issue 7-12, 2003, Pages 924-932

  Zhang, H ^a   Li, D Y ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Double glow discharge; High temperature; Tungsten coating; Wear

Indexed keywords

ELASTICITY; ENERGY DISPERSIVE SPECTROSCOPY; GLOW DISCHARGES; HARDNESS; HIGH TEMPERATURE OPERATIONS; MELTING; METALLOGRAPHIC MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TRIBOLOGY; WEAR RESISTANCE;

TRIBOMETERS;

INORGANIC COATINGS;

COATING; HIGH TEMPERATURE APPLICATION; SPUTTERING; TRIBOLOGY; TUNGSTEN; WEAR;

EID: 0042522478     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00154-6     Document Type: Article

References (19)

1. Lavigne S.B.Moreau C.Jacques R.G.S.The relationship between the microstructure and thermal diffusivity of plasma sprayed tungsten coatings J. Therm. Spray Technol. 4 1995 261-267
2. Dhote AM.Ogale S.B.Deposition of tungsten films by pulsed excimer laser albation Appl. Phys. Lett. 64 1994 2809-2811
3. Varacalle D.J.Lundberg L.B.Jacox M.G.Hartenstine J.R.Riggs W.L.Herman H.Bancke G.A.Fabrication of tungsten coatings and monoliths using the vacuum plasma spray process Surf. Coat. Technol. 61 1993 79-85
4. Arons R.M.Dusek J.T.Hafstrom J.W.Development of tungsten coatings for the corrosion protection of alumina-based ceramics Thin Solid Films 64 1979 347-350
5. Maier H.Koetterl S.Krieger K.Neu R.Balden M.Performance of tungsten coatings a s plasma facing components used in ASDEX upgrade J. Nucl. Mater. 258-263 1998 921-926
6. Mani S.S.Fleming J.G.Sniegowski J.J.de Boer M.P.Irwin L.W.Walraven J.A.Tanner D.M.Dugger M.T.Chemical vapor deposition coating for micromechanics Mater. Res. Soc. Symp. Proc. 616 2000 21-26
7. Sheward J.A.Young W.J.The deposition of molybdenum and tungsten coatings on gun steel substrate by a plasma assisted CVD technique Vacuum 36 1986 37-41
8. Mani S.S.Fleming J.G.Sniegowski J.J.de Boer M.P.Irwin L.W.Walraven J.A.Tanner D.M.La Van D.A.Selective W for coatings and releasing MEMs devices Mater. Res. Soc. Symp. Proc. Mater. Res. Soc. 605 2000 135-140
9. Moreau C.Fargier R.P.Saint Jacques R.G.Cielo P.Thermal diffusivity of plasma-sprayed tungsten coatings Surf. Coat. Technol. 61 1993 67-71
10. Garcia R.C.Deschka S.Hohenauer W.Duwe R.Gauthier E.Kinke J.Lochter M.Mallener W.Plochl L.Rodhammer P.Salito A.High-heat-flux loading of tungsten coatings on graphite deposited by plasma spray and physical vapor deposition Fusion Technol. 32 1997 263-276
11. Kingswell R.Rickerby D.S.Scott K.T.Erosive wear of thermally sprayed tungsten coatings Thin Solid Films 198 1991 139-148
12. Tul' E.V.V.V.Kulikauskas V.S.Tashlykov I.S.Composition of the near-surface layers of aluminum after ion-assisted deposition of molybdenum and tungsten coatings Phys. Chem. Mech. Surf. 11 1995 955-959
13. Xu Z.Su Y.A.Wang C.Z.Gao Y.Tang B.Xu Z.F.Double glow discharge plasma surface alloying J. Adv. Mater. 31 1999 3-6
14. Arslanbekov R.R.Kudryavtsev A.A.Tobin R.C.On the hollow-cathode effect: conventional and modified geometry Plasma Sour. Sci. Technol. 7 1998 310-322
15. 3 (0 1 2) substrates by sol-gel procedure Appl. Surf. Sci. 169-170 2001 564-569
16. 2 elimination reaction, in: Proceedings of the International Conference on Thermoelectrics, ICT, 1996, pp. 430-434.
17. Thornton J.A.Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputted coatings J. Vac. Sci. Technol. 11 1974 666-670
18. Liu R.Li D.Y.Xie Y.S.Llewellin R.Hawthorne H.M.Indentation behavior of pseudoelastic TiNi alloy Scripta Mater. 41 1999 691-696
19. I.M. Hutchings, Wear of Engineering Material, CRC Press, Boca Raton, FL, 1992, p. 28.