Hybrid integration of III-V optoelectronic devices on Si platform using BCB

Materials Research Society Symposium - Proceedings

Volumn 741, Issue , 2002, Pages 123-128

  Katsnelson, Alex ^a   Tokranov, Vadim ^a   Yakimov, Michael ^a   Lamberti, Matthew ^a   Oktyabrsky, Serge ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MOLECULAR BEAM EPITAXY; OPTICAL INTERCONNECTS; ORGANIC POLYMERS; PHOTODETECTORS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR LASERS; SEMICONDUCTOR QUANTUM WELLS; SUBSTRATES;

BENZOCYCLOBUTENE POLYMER; CHIP-LEVEL OPTICAL INTERCONNECT; COPLANAR METALLIZATION; ELECTROLUMINESCENCE SPECTRUM; VERTICAL CAVITY SURFACE EMITTING LASER;

LIGHT EMITTING DIODES;

EID: 0042510542     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-741-j5.15     Document Type: Conference Paper

References (11)

1. S. Oktyabrsky, J. Castracane, and A. Kaloyeros, Emerging Technologies for Chip-Level Optical Interconnects, Proc. SPIE, 4652, 213 (2002).
2. V. Joshkin, A. Orlikovsky, S. Oktyabrsky, K. Dovidenko, A. Kvit, I. Muhamedzanov and E. Pashaev, J. Cryst. Growth 147, 13 (1995)
3. T. Sudersena Rao, K. Nozawa, and Y. Horikoshi, Appl. Phys Lett. 62, 154 (1993)
4. J. De Boeck, P. Demeester, and G. Borghs, J. Vac. Sci. Technol. A 12, 995 (1994)
5. E.A. Beam and Y.C. Kao, J. Appl. Phys. 69, 4253 (1991)
6. Eli Yablonovitch, T. Gmitter, J. P. Harbison, and R. Bhat, Appl. Phys. Lett. 51, 2222 (1987)
7. Jong-Hee Kim, Dae Ho Lim, and Gye Mo Yang. J. Vac. Sci. Technol. B 16, 558 (1998)
8. Eun-A Moon, Jong-Lam Lee, and Hyung Mo Yoo, J. Appl. Phys. 84, 3933 (1998)
9. S. Matsuo, K. Tateno, T. Nakahara, H. Tsuda and T. Kurokawa, Electron. Lett. 22, 1148 (1997)
10. Mitsuru Funato, Shizuo Fujita, and Shigeo Fujita, Appl. Phys. Lett. 77, 3959 (2000)
11. Karl Joachim Ebeling, "Analysis of vertical cavity surface emitting laser diodes (VCSEL)", Semiconductor quantum optoelectronic, ed. A. Miller, E. Ebrahimzeden and D.M. Finlayson, (A NATO Advanced Study Institute, 1998), pp.295-338