Infrared studies of oxygen-related defect formation in neutron-irradiated Cz-silicon after annealing at T = 450-650 °C under hydrostatic pressure

Materials Science and Engineering: B

Volumn 102, Issue 1-3, 2003, Pages 339-343

  Surma, B ^a   Londos, C A ^b   Emtsev, V V ^c   Misiuk, A ^a   Bukowski, A ^a,d   Potsidi, M S ^b  

^a ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

^b Department of Physics ^*  (Greece)

^c IOFFE INSTITUTE   (Russian Federation)

^d Cemat Silicon SA   (Poland)

Author keywords

Absorption; Heat treatment; High pressure; Neutron irradiation; Silicon

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; CRYSTAL GROWTH FROM MELT; HYDROSTATIC PRESSURE; INFRARED RADIATION; LIGHT ABSORPTION; NEUTRON IRRADIATION;

THERMAL DOUBLE DONORS (TDD);

SEMICONDUCTING SILICON;

EID: 0042431929     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00615-3     Document Type: Conference Paper

References (18)

1. F. Shimura (Ed.), Oxygen in Silicon, Academic Press, Boston, 1994.
2. Wagner P., Hage J. J. Appl. Phys. A. 49:1989;123.
3. Götz W., Pensl G., Zulehner W. Phys. Rev. B. 46:1992;4312.
4. Corbett J.W., Frisch H.L., Snyder L.C. Mater. Lett. 2:1984;209.
5. Halberg T., Lindström J.L. J. Appl. Phys. 79:1996;7570.
6. Öberg S., Ewels C.P., Jones R., Halberg T., Lindström J.L., Murin L.I., Briddon P.R. Phys. Rev. Lett. 81:1998;2930.
7. Murin L.I., Halberg T., Markevich V.P., Lindström J.L. Phys. Rev. Lett. 80:1998;93.
8. Emtsev V.V., Oganesyan G.A., Schmalz K. Solid State Phenom. 47/48:1996;259.
9. Kamiura Y., Suezawa M., Sumino K., Hashimoto F. Jpn. J. Appl. Phys. 29:1990;L1937.
10. Misiuk A., Jung W., Surma B., Jun J., Rozental M. Solid State Phenom. 57/58:1997;393.
11. Brown A.B., Claybourn M., Murray R., Murray P.S., Nandhra P.S., Newman R.C., Tucker J.H. Semicond. Sci. Technol. 3:1988;591.
12. Svensson J., Svensson B.G., Lindström J.L.L. Appl. Phys. Lett. 21:1986;1435.
13. Barber S.C. Thin Solid Films. 72:1980;201.
14. Wagner P. Mater. Res. Soc. Symp. Proc. 59:1986;125.
15. Stein H.J. Mater. Sci. Forum. 10-12:1986;935.
16. Halberg T., Lindström J.L. J. Appl. Phys. 72:1992;5130.
17. Z. Li, H.W. Kramer, ROSE Collaboration Meeting, CERN, June 1, 1999, p. 108.
18. T-2 Nuclear Information Service, Los Alamos National Laboratory.