High-performance microwave coplanar bandpass and bandstop filters on Si substrates

IEEE Transactions on Microwave Theory and Techniques

Volumn 51, Issue 9, 2003, Pages 2036-2040

  Chan, K T ^a   Chin, Albert ^a   Li, Ming Fu ^b   Kwong, Dim Lee ^c   McAlister, Sean P ^d   Duh, D S ^e   Lin, W J ^e   Chang, C Y ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c The University of Texas at Austin   (United States)

^d NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^e INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

Bandpass; Bandstop; Filter; Integration; Millimeter wave; Si

Indexed keywords

ELECTRIC RESISTANCE; MICROWAVE DEVICES; RESONATORS; SILICON;

COPLANAR FILTERS;

ELECTRIC FILTERS;

EID: 0042363603     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2003.815890     Document Type: Article

References (13)

1. A. Takacs, H. Aubert, P. Pons, R. Plana, T. Parra, J. Graffeuil, H. Baudrand, and J. L. Cazaux, "An original micromachined planar Ka, band filter based on a resonant coupling irises topology," in IEEE Int. Semiconductor Conf., 2001, pp, 147-150.
2. T. M. Weller and L. P. Katehi, "Miniature stub and filter designs using the microshield transmission line," in IEEE MTT-S Int. Microwave Symp. Dig. Dig., vol. 2, June 1995, pp. 675-678.
3. J. Papapolymerou and G. E. Ponchak, "Microwave filters on a low resistivity Si substrate with a polyimide interface layer for wireless circuits," in IEEE RF-IC Symp. Dig., June 2001, pp. 125-128.
4. K. Hettak, N. Did, A.-F. Sheta, and S. Toutain, "A class of novel uniplanar series resonators and their implementation in original applications," IEEE Trans. Microwave Theory Tech., vol. 46, pp. 1270-1276, Sept. 1998.
5. A. Chin, K. Lee, B. C. Lin, and S. Horng, "Picosecond photoresponse of carriers in Si ion-implanted Si," Appl. Phys. Lett., vol. 69, pp. 653-655, 1996.
6. Y. H. Wu, A. Chin, K. H. Shih, C. C. Wu, C. P. Liao, S. C. Pai, and C. C. Chi, "Fabrication of very high resistivity Si with low loss and cross talk," IEEE Electron Device Lett., vol. 21, pp. 442-444, Sept. 2000.
7. Y. H. Wu, A. Chin, K. H. Shih, C. C. Wu, S. C. Pai, C. C. Chi, and C. P. Liao, "RF loss and cross talk on extremely high resistivity (10 K-1 Mω - cm) Si fabricated by ion implantation," in IEEE MTT-S Int. Microwave Symp. Dig., June 2000, pp. 221-224.
8. K. T. Chan, A. Chin, C. M. Kwei, D. T. Shien, and W. J. Lin, "Transmission line noise from standard and proton-implanted Si," in IEEE MTT-S Int. Microwave Symp. Dig., June 2001, pp. 763-766.
9. K. T. Chan, A. Chin, Y. B. Chan, T. S. Duh, and W. J. Lin, "Integrated antenna on Si, proton-implanted Si and Si-on-quartz," in Int. Electron Devices Meeting Tech. Dig., Dec. 2001, pp. 903-906.
10. K. T. Chan, C. Y. Chen, A.Albert Chin, J. C. Hsieh, J. Liu, T. S. Duh, and W. J. Lin, "40-GHz coplanar waveguide bandpass filters on silicon substrate," IEEE Microwave Wireless Comp. Lett., pp. 429-431, Nov. 2002.
11. C. M. Nam and Y. S. Kwon, "Coplanar waveguides on silicon substrate with thick oxidized porous silicon (OPS) layer," IEEE Microwave Guided Wave Lett., vol. 8, pp. 369-371, Nov. 1998.
12. K. J. Herrick, T. A. Schwarz, and L. P. B. Kathehi, "Si-micromachined coplanar waveguides for use in high-frequency circuits," IEEE Trans. Microwave Theory Tech., vol. 46, pp. 762-768, June 1998.
13. Y. H. Wu, A. Chin, C. S. Liang, and C. C. Wu, "The performance limiting factors as RF MOSFET's scaling down," in IEEE RF-IC Symp. Dig., June 2000, pp. 151-154.