40-GHz coplanar waveguide bandpass filters on silicon substrate

IEEE Microwave and Wireless Components Letters

Volumn 12, Issue 11, 2002, Pages 429-431

  Chan, K T ^a   Chen, C Y ^a   Chin, Albert ^a   Hsieh, J C ^b   Liu, J ^b   Duh, T S ^c   Lin, W J ^c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b United Microelectronics Cooperation   (Taiwan)

^c INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTRIC LOSSES; ION IMPLANTATION; PROTONS; SCATTERING PARAMETERS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; VLSI CIRCUITS; WAVEGUIDES;

PROTON IMPLANTATION; SOFTWARE PACKAGE IE3D;

BANDPASS FILTERS;

EID: 0036862143     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2002.805535     Document Type: Article

References (10)

1. K. Hettak, N. Did, A.-F. Sheta, and S. Toutain, "A class of novel uniplanar series resonators and their implementation in original applications," Trans. Microwave Theory Tech., vol. 46, pp. 1270-1276, Sept. 1998.
2. K. T. Chan, A. Chin, C. M. Kwei, D. T. Shien, and W. J. Lin, "Transmission line noise from standard and proton-implanted Si," in IEEE MTT-S Int. Microwave Symp. Dig., June 2001, pp. 763-766.
3. K. T. Chan, A. Chin, Y. B. Chen, Y.-D. Lin, D. T. S. Duh, and W. J. Lin, "Integrated antennas on Si, proton-implanted Si and Si-on-quartz," in IEDM Tech. Dig., Dec. 2001, pp. 903-906.
4. Y. H. Wu, A. Chin, K. H. Shih, C. C. Wu, S. C. Pai, C. C. Chi, and C. P. Liao, "RF loss and cross talk on extremely high resistivity (10K-1M-cm) Si fabricated by ion implantation," in IEEE MTT-S Int. Microwave Symp. Dig., June 2000, pp. 241-244.
5. Y. H. Wu, A. Chin, K. H. Shih, C. C. Wu, C. P. Liao, S. C. Pai, and C. C. Chi, "Fabrication of very high resistivity Si with low loss and cross talk," IEEE Electron Device Lett., vol. 21, pp. 394-396, Sept. 2000.
6. Y. H. Wu, A. Chin, C. S. Liang, and C. C. Wu, "The performance limiting factors as RF MOSFET's scaling down," in Int. RF-IC Symp., June 2000, pp. 151-155.
7. A. Chin, K. Lee, B. C. Lin, and S. Horng, "Picosecond photoresponse of carriers in Si ion-implanted Si," Appl. Phys. Lett., vol. 69, pp. 653-656, 1996.
8. C. M. Nam and Y. S. Kwon, "Coplanar waveguides on silicon substrate with thick oxidized porous silicon (OPS) layer," IEEE Microwave Guided Wave Lett., vol. 8, pp. 369-371, Nov. 1998.
9. K. J. Herrick, T. A. Schwarz, and L. P. B. Kathehi, "Si-micromachined coplanar waveguides for use in high-frequency circuits," IEEE Trans. Microwave Theory Tech., vol. 46, pp. 762-768, June 1998.
10. J. R. Long and M. Danesh, "A uniform compact model for planar RF/MMIC interconnect, inductors and transformers," in Bipolar/BiCMOS Circuits Technol. Meeting, 2001, pp. 167-170.