Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 40-48

  Rigato, V ^a   Patelli, A ^a,b   Maggioni, G ^a   Salmaso, G ^a   Mattarello, V ^a   Pelizzo, M G ^b   Nicolosi, P ^b   Depero, L ^c   Bontempi, E ^c   Mazzoldi, P ^b  

^a LABORATORI NAZIONALI DI LEGNARO   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

^c UNIVERSITY OF BRESCIA   (Italy)

Author keywords

EUV; Mirror; Multilayer; Soft X Ray; Sputtering

Indexed keywords

LIGHT REFLECTION; LITHOGRAPHY; MIRRORS; MIXTURES; OPTICAL MULTILAYERS;

X-RAY MICRO-DIFFRACTION (MICRO-XRD);

ION BOMBARDMENT;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0042357376     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00706-0     Document Type: Article

References (21)

1. Solar Orbiter, A High Resolution Mission to the Sun and Inner Heliosphere, Assessment Study Report, ESA-SCI (2000) 6, 2000
2. Spiller E. Dehz P. Weisbuch C. Physics, Fabrication and Applications of Multilayered Structures 1988 271-309 Plenum Publishing Corporation
3. J.M. Defise, X.Y. Song, J.P. Delaboudiniere, G.E. Artzner, C. Carabetian, J.F.E. Hochedez, J. Brunaud, J.D. Moses, R.C. Catura, F. Clette, A.J. Maucherat, in: S. Fineschi (Ed.). X-Ray and EUV/FUV Spectroscopy and Polarimetry, Proc. SPIE 2517, 29-39 (1995)
4. Hawryluk A.M. Sappala L.G. J. Vac. Sci. Technol. B 6 1998 2162
5. Spiller E. Soft X-Ray Optics 1994 183-184 SPIE Optical Engineering Press Bellingham, Washington, DC
6. Pelizzo M.G. Patelli A. Nicolosi P. Rigato V. Salmaso G. Bontempi E.et al. Development of multilayer coatings for solar space experiments Presented at Astronomical Telescopes and Instrumentation SPIE Conference 4853, August 2002 Waikoloa, Hawaii, USA 2002
7. T.Feigl, S. Yulin, T. Kuhlmann, N. Kaiser, Soft X-Ray and EUV imaging Systems II, Daniel A. Tichenor, James A. Folta, (Eds.), Proc. SPIE vol. 4506, p. 121-126
8. S. Bajt, J. Alameda, T. Barbee Jr., W.M. Clift, et al., Soft X-Ray and EUV Imaging Systems II, Daniel A. Tichenor, James A. Folts (Eds.) Proc. SPIE vol. 4506, p. 65-75
9. Eriksson F. Johansson G.A. Hertz H.M. Birch J. Enhanced soft X-ray reflectivity of Cr/Sc multilayers by ion assisted sputter deposition Tichenor A. et al. Soft X-Ray and EUV Imaging Systems II, SPIE Proceedings 4506 2001 84-92
10. E. Louis, A.E. Yakshin, P.C. Görts, Winfred M. Kaiser, Richard H. Stulen, (Eds.) Proc. SPIE vol. 4146, p. 60-63
11. Zhou X.W. Wadley H.N.G. J. Appl. Phys. 87 12 2000 8487
12. Zhou X.W. Wadley H.N.G. J. Appl. Phys. 84 4 1998 2301
13. Zhou X.W. Wadley H.N.G. J. Appl. Phys. 88 10 2000 5737
14. Rigato V. Patelli A. Novel methods of synthesis of Mo/Si(H) multilayers for extreme UV applications AIP Conference Proceedings X-Ray and Inner-Shell Processes (Rome 24-28 June 2002) 652 2002 103-111
15. Hopkins M.B. Graham W.G. Rev. Sci. Instrum. 57 9 1986 2210
16. Eckstein W. Computer Simulation of Ion-Solid Interactions 1991 Springer-Verlag Berlin-Heidelberg
17. Coufal H. Winters H.F. Bay H.L. Eckstein W. Phys. Rev. B 44 10 1991 4747-4758
18. Somekh R.E. J. Vac. Sci. Technol. A 2 3 1984 1285
19. Berg S. Barklund A.M. Gelin B. Nender C. Katardjiev I. J. Vac. Sci. Technol. A 10 4 1992 1592-1596
20. Hjörvarsson B. Vergnat M. Birch J. Sundgren J.-E. Rodmacq B. Phys. Rev. B 50 1994 11223
21. D.L. Windt, Comput. Phys. 12 (1998) 360