Novel methods of synthesis of a-Si(H)/Mo multilayers for Extreme UV applications

AIP Conference Proceedings

Volumn 652, Issue , 2003, Pages 103-111

  Rigato, V ^a   Patelli, A ^a,b  

^a SEZIONE DI PADOVA   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TEMPERATURE; HYDROGEN; LANGMUIR PROBES; OPTICAL MULTILAYERS; PLASMA DENSITY; SILICON; SILICON ALLOYS; X RAYS;

ACCURATE MEASUREMENT; HYDROGEN CONCENTRATION; HYDROGEN INCORPORATION; MATERIAL DENSITY; MULTI-LAYER MIRRORS; PLASMA COMPOSITION; PLASMA POTENTIAL; PLASMA SPUTTERING;

MULTILAYERS;

EID: 0042704013     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1536366     Document Type: Conference Paper

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