Deposition of MgO films by ICP assisted evaporation

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 235-239

  Han, Yeonghun ^a   Jung, S J ^a   Lee, J J ^a   Joo, J H ^b  

^a Seoul National University   (South Korea)

^b Kunsan National University   (South Korea)

Author keywords

MgO; PDP; Protective layer

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; EVAPORATION; INDUCTIVELY COUPLED PLASMA;

SUBSTRATE HEATING;

MAGNESIA;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0042357309     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00619-4     Document Type: Article

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