Tunneling induced charge generation in SiO2 thin films

Journal of Applied Physics

Volumn 83, Issue 7, 1998, Pages 3898-3905

  Chen, Chun ^a,b   Wilson, William L ^a   Smayling, Michael ^a,c  

^a Rice University   (United States)

^b MICRON TECHNOLOGY INC   (United States)

^c TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042184583     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366624     Document Type: Article

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