Optical MEMS for high-end micro-spectrometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4928, Issue , 2002, Pages 6-14

  Riesenberg, Rainer ^a   Wuttig, Andreas ^a   Nitzsche, Günter ^a   Harnisch, Bernd ^b  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

^b EUROPEAN SPACE AGENCY   (Netherlands)

Author keywords

MEMS; Optical sensor; Slit mask; Spatial light modulator; Spectrophotometer; Subpixel analysis

Indexed keywords

ARCHITECTURE; DIFFRACTION; DIFFRACTION GRATINGS; LIGHT MODULATORS; MEMS; OPTICAL SENSORS; PIXELS; SPECTROPHOTOMETERS;

DIFFRACTION LIMITS; ENTRANCE APERTURES; MICRO-SPECTROMETER; POSITIONING SYSTEM; SLIT MASK; SPATIAL LIGHT MODULATORS; SPECTRAL SENSORS; SUB-PIXEL ANALYSIS;

SPECTROMETERS;

EID: 0042181968     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.483168     Document Type: Conference Paper

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