Development of individually addressable micromirror arrays for space applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 365-371

  Dutta, Sanghamitra B ^a   Ewin, Audrey J ^a   Jhabvala, Murzy D ^a   Kotecki, Carl A ^a   Kuhn, Jonathan L ^a   Mott, David B ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

Author keywords

Cryogenic CMOS; Cryogenic mems; Mems; Micro mirror array; Ngst

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTROSTATIC ACTUATORS; MICROMETERS; MIRRORS; NASA; SPACE APPLICATIONS; SPACE TELESCOPES;

ANALYTICAL STUDIES; ASTRONOMICAL APPLICATION; CRYOGENIC TEMPERATURES; DETECTOR DEVELOPMENT; ELECTROSTATIC ACTUATION; MICROMIRROR ARRAY; NEXT GENERATION SPACE TELESCOPES; PROCESS INTEGRATION;

INTEGRATION TESTING;

EID: 0000171805     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396508     Document Type: Conference Paper

References (8)

1. J.W. MacKenty et al., "NGST-MOS: A Multi-Object Spectrometer Using Micro Mirror Arrays", Final Report of the NGST-MOS Pre-Phase A Science Instrument Study, NGST/NASA Document # 496 (September 1999).
2. Texas Instruments Technical Journal, Vol 15, No. 3, July-September 1998.
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7. K. Reimer, R. Engelke, M. Witt, and B. Wagner, "16 k Infrared Micromirror Arrays with Large Beam Deflection and Tenth Millimeter Pixel Size, " SPIE Conference on Miniaturized Systems with Micro-Optics and MEMS, Santa ClaraSPIE Vol. 3878, pp. 272-280, September 1999.
8. John DeGaspari, "Micromirrors Evaluated for Space Telescope", Mechanical Engineering Magazine, Vol. 122, No. 2, pp. 30-31, Februaiy 2000.