Addressable micro-slit-array devices for miniaturized systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 155-163

  Seifert, Thomas ^a   Riesenberg, Rainer ^a   Buecker, Peter ^a   Martin, Thomas ^a   Goetz, Bernt ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT MODULATORS; MICROACTUATORS; MICROOPTICS; MINIATURE INSTRUMENTS; OPTICAL SHUTTERS; PIEZOELECTRIC DEVICES; SPECTROMETERS;

MICROFABRICATION; PIEZOACTUATOR; SCANNER;

OPTICAL SYSTEMS;

EID: 0033310346     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)