Apparatus for real-time measurement of stress in thin films at elevated temperatures

Chinese Physics Letters

Volumn 20, Issue 8, 2003, Pages 1387-1389

  An, Bing ^a   Zhang, Tong Jun ^a   Yuan, Chao ^a   Cui, Kun ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

STRESS MEASUREMENT; THIN FILMS;

ANNEALING PROCESS; CCD DETECTORS; CREEP EXPERIMENTS; ELEVATED TEMPERATURE; FILM STRESS MEASUREMENTS; MEASUREMENTS OF; MULTIBEAMS; REAL TIME MEASUREMENTS; REAL- TIME; THIN-FILMS;

FILM PREPARATION;

EID: 0042024827     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/20/8/360     Document Type: Article

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