Investigation of the interfacial structure of ultra-thin platinum film deposited by cathodic-arc

Thin Solid Films

Volumn 440, Issue 1-2, 2003, Pages 117-122

  Swift, P D ^a   Solina, D M ^a   Cheary, R W ^a   McCredie, G M ^a  

^a UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

Author keywords

Interfaces; Platinum; X ray photoelectron spectroscopy; X ray total reflection analysis

Indexed keywords

CATHODES; DEPOSITION; ELECTRON BEAMS; EVAPORATION; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; MIRRORS; MULTILAYERS; PLATINUM; SILICON; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

INTERFACIAL STRUCTURES;

ULTRATHIN FILMS;

EID: 0042023779     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00594-7     Document Type: Article

References (16)

1. Solina D.M., Cheary R.W., Swift P.D., Dligatch S., McCredie G.M., Gong B., Lynch P. Thin Solid Films. 372:2000;94.
2. Krug C., Salgado T.D.M., Stedile F.C., Baumvol I.J.R. Nucl. Inst. Meth. B. 175-177:2001;694.
3. Anders A., Anders S., Brown I.G., Ivanov I.C. Mat. Res. Soc. Symp. Proc. 388:1995;215.
4. Anders S., Anders A., Kortright J.B., Yu K.M., Brown I.G., Ivanov I.C. Surf. Coat. Technol. 61:1993;257.
5. Kim D.-E., Lee S.-M., Jeon I.-J., Yaanaihara M. Appl. Surf. Sci. 127-129:1998;531.
6. Dunyluk S., McGuire G.E. J. Appl. Phys. 45:1974;5141.
7. Goodnick S.M., Fathipour M., Ellsworth D.L., Wilmsen C.W. J. Vac. Sci. Technol. 18:(3):1981;949.
8. Leihr M., LeGoues F.K., Rubloff G.W., Ho P.S. J. Vac. Sci. Technol. A. 3:1985;983.
9. Brown I.G., Galvin J.E., Gavin B.F., MacGill R.A. Rev. Sci. Instr. 57:1986;1069.
10. Evans P.J., Watt G.C., Noorman J.T. Rev. Sci. Instr. 65:1994;3082.
11. Lukeš F. Surf. Sci. 30:1972;91.
12. Cowley R.A., Ryan T.W. J. Phys. D: Appl. Phys. 20:1987;61.
13. Gibaud A., Vignaud G. Acta Cryst. A. 49:1993;642.
14. S. Grassl, D. Fuchs, Reflectivity Software WIN-REFSIM, Version 1.1d. Copyright Siemens Ag, Bruker Analytical X-ray Systems Inc., Karlsruhe, Germany, 1992-1995.
15. Parratt L.G. Phys. Rev. 95:1954;359.
16. Seath M.P., Dench W.A. Surf. Interface. Anal. 1:1979;2.