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Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 531-535

Characterization of a multilayer soft X-ray reflector fabricated by pulsed laser deposition

(4) Kim, Dong Eon a Lee, Soo Mi a Jeon, In Joon a Yanagihara, M b

a Pohang University of Science and Technology (POSTECH) (South Korea)

b TOHOKU UNIVERSITY (Japan)

Author keywords

Multilayer; Pulsed laser deposition; Small angle X ray scattering; Soft X ray reflectivity

Indexed keywords

DEPOSITION; LASER PRODUCED PLASMAS; MOLYBDENUM; NEODYMIUM LASERS; PHOTOELECTRON SPECTROSCOPY; PULSED LASER APPLICATIONS; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

PULSED LASER DEPOSITION; SMALL ANGLE X RAY SCATTERING (SAXS); SOFT X RAY REFLECTIVITY;

MULTILAYERS;

EID: 0032070527 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(97)00699-5 Document Type: Article

Times cited : (10)

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