Influence of Si substrate orientation on stress development in Pd suicide films grown by solid-state reaction

Applied Physics Letters

Volumn 83, Issue 7, 2003, Pages 1334-1336

  Gergaud, P ^a   Megdiche, M ^a   Thomas, O ^a   Chenevier, B ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; MICROSTRUCTURE; PALLADIUM; SINGLE CRYSTALS; STRESS RELAXATION; THIN FILMS;

SOLID-STATE REACTION;

SOLID STATE PHYSICS;

EID: 0041917723     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1601301     Document Type: Article

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