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Volumn 615, Issue , 2000, Pages G831-G836
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In situ curvature and diffraction studies of Pd films on Si(001) during solid-state reaction
a a a c d d
c
ENSPG
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPRESSIVE STRESS;
CRYSTALLINE MATERIALS;
PALLADIUM;
SEMICONDUCTING SILICON;
SOLID STATE PHYSICS;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
SOLID-STATE REACTIONS;
METALLIC FILMS;
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EID: 0034429055
PISSN: 02729172
EISSN: None
Source Type: Journal
DOI: 10.1557/proc-615-g8.3.1 Document Type: Article |
Times cited : (5)
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References (10)
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