Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 1059-1063

  Churpita, A ^a,b   Hubicka Z ^a   Cada, M ^a   Chvostova D ^a   Soukup, L ^a   Jastrabik L ^a   Ptacek P ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

Author keywords

Atmospheric barrier torch; Electrical conductivity; InxOy and SnOx; Low temperature; Thin films

Indexed keywords

ADHESION; ELECTRIC CONDUCTIVITY; INDIUM COMPOUNDS; LIGHT EMISSION; PLASMA JETS; PLASMA TORCHES; SUBSTRATES; THIN FILMS; TIN COMPOUNDS;

THERMAL DAMAGES;

COATING TECHNIQUES;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0041852593     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00556-5     Document Type: Article

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