Microfluidics for thermal management: Applications, fabrication, and demonstration in LTCC

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5231, Issue , 2003, Pages 217-222

  Smith, Brian ^a   Pleskach, Michael ^a   Gamlen, Carol ^a  

^a National Center for Health Statistics   (United States)

Author keywords

Capillary pumped loop; Embedded cavities; Microfluidics; Micropower generation; Thermal management

Indexed keywords

COOLING; ELECTRONICS PACKAGING; HEAT FLUX; HERMETIC DEVICES; POWER GENERATION; RELIABILITY; THERMODYNAMIC STABILITY;

HERMETICITY; LOW TEMPERATURE COFIRED CERAMICS; MICROFLUIDICS; THERMAL MANAGEMENT;

CERAMIC MATERIALS;

EID: 0041828726     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. Issam Mudawar, "Assessment of High-Heat-Flux Thermal Management Schemes", IEEE Transactions-CPMT: Components and Packaging Technologies, Vol. 24 pp. 122-141, 2001.
2. Steven Snyder, C. M. Newton, and M. Lange, "Miniature Embedded Heat Pipes in Low Temperature Co-Fired Ceramic for Electronic Devices Requiring Temperature Stability", SAE Power Systems Conference, October 2000, San Diego, CA, paper # 2000-01-3621.
3. Mark Zampino and W.K. Jones, "Substrate Embedded Heat Pipes Compatible with Cofire Processing", Proceedings of the International Symposium of Microelectronics (IMAPS), 1997.
4. W. Kinzy Jones and M. Zampino, "Embedded Miniature Heat Pipes in Ceramic Cofire Substrates", Aerospace Power Systems Conference, April 1999, Mesa, AZ, paper # 1999-01-1361
5. Jeffrey Kirshberg, K. Yerkes, and D. Liepmann, "Demonstration of a Micro-CPL Based on MEMS Fabrication Technologies" Proceedings of 35th Intersociety Energy Conversion Engineering Conference and Exhibit (IECEC), Las Vegas, NV, July 24-28, paper #AIAA-2000-3015 American Institute of Aeronautics and Astronautics, 2000
6. Kenneth Pettigrew, B. Smith, K. Yerkes, C. Gamlen, and D. Liepmann, "Development and Testing of a Planar, Silicon Mini-Capillary Pumped Loop" Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, November 11-16, 2001
7. J. Espinoza-Vallejos, et.al, "The Measurement and Control of Sagging in Meso Electromechanical LTCC Structures and Systems" MRS Conference Proceedings 518 pp. 73-79, 1998.
8. Brian Smith, R. Pike, M. Newton "Embedded Hermetic Cavity Fabrication in Low Temperature Cofire Ceramic" U.S. Patent Pending
9. Brian Smith, R. Rumpf, M. Newton "Electronic Module Including a Cooling Substrate Having a Fluid Cooling Circuit Therein and Related Methods" U.S. Patent 6,452,798 September 17, 2002
10. A. Faghri, "Heat Pipe Science and Technology" Taylor & Francis, Washington D.C, 1995
11. G.P Peterson, A. Duncan, and M. Weichold "Experimental Investigation of Micro Heat Pipes Fabricated in Silicon Wafers" Journal of Heat Transfer, Vol 115, pp. 751-756, 1993