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Volumn 43, Issue 2, 2000, Pages 185-198

Synthesis and characterization of C3N4 hard films

Author keywords

Film deposition; MPCVD; C3N4

Indexed keywords


EID: 0041687998     PISSN: 10069283     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02876045     Document Type: Article
Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.