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Volumn 14, Issue 7, 2003, Pages 820-823
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Finite element analysis of self-positioning microstructures and nanostructures
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL LATTICES;
ETCHING;
FINITE ELEMENT METHOD;
MATHEMATICAL MODELS;
MICROSTRUCTURE;
MULTILAYERS;
SELF-POISONING MICROSTRUCTURE;
SELF-POISONING NANOSTRUCTURES;
NANOSTRUCTURED MATERIALS;
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EID: 0041492978
PISSN: 09574484
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-4484/14/7/322 Document Type: Article |
Times cited : (20)
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References (7)
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