Coriolis mass flow sensor structure in silicon

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 156-161

  Enoksson, Peter ^a   Stemme, Goran ^a   Stemme, Erik ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY MEASUREMENT (SPECIFIC GRAVITY); DENSITY OF LIQUIDS; ELECTROSTATICS; OPTICAL DEVICES; RESONANCE; RESONATORS; TUBES (COMPONENTS); VISCOSITY;

CORIOLIS FORCE; CORIOLIS MASS FLOW SENSOR STRUCTURE; DOUBLE LOOP TUBE STRUCTURE; LIQUID DENSITY MEASUREMENT;

SILICON SENSORS;

EID: 0029732717     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)