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Volumn 76, Issue 19, 2000, Pages 2698-2700

Diffuse x-ray rods and scattering from point defect clusters in ion implanted silicon

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EID: 0040960979 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.126447 Document Type: Article

Times cited : (20)

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