Amorphization of single-crystalline silicon by thermal-energy atomic hydrogen

Applied Physics Letters

Volumn 75, Issue 1, 1999, Pages 91-93

  Kang, J H ^a   Jo, S K ^a   Gong, B ^b   Parkinson, P ^b   Brown, D E ^b   White, J M ^b   Ekerdt, J G ^b  

^a Gachon University   (South Korea)

^b UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040668768     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124286     Document Type: Article

References (21)

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